发明名称 PHOTOSENSITIVE MATERIAL
摘要 PURPOSE:To obtain a photosensitive material having superior photosensitivity and suitable for use as a photoresist, a printing plate material, etc. by blending a vinyl polymer contg. amino groups, a photosensitive compound contg. a carboxyl group (or a sulfonic acid group) and a photosensitizer. CONSTITUTION:The following three components are blended: a vinyl polymer (a) contg, amino groups and having >=1.5X10<-3>mol/g amine equivalent, a compound (b) such as acrylic acid or allyl sulfonic acid contg. a photosensitive group and a carboxyl group (or a sulfonic acid group) and a photosensitizer (c) such as Michler's ketone. The vinyl polymer is a (co)polymer of a vinyl compound such as dimethylaminoethyl methacrylate or 2-vinylpyridine contg. an amino group. The amount of compound (b) blended is >= about 1.5X10<-3>mol/g of polymer (a), and the amount of photosensitizer (c) is about 0.1-10% to the total amount of polymer (a) and compound (b).
申请公布号 JPS5655941(A) 申请公布日期 1981.05.16
申请号 JP19790130887 申请日期 1979.10.12
申请人 TORAY INDUSTRIES 发明人 HIRAMOTO TOSHI;EGUCHI MASUICHI
分类号 G03F7/038;G03F7/032;H01L21/027;H01L21/302 主分类号 G03F7/038
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