VERFAHREN ZUM HERSTELLEN VON FELDEFFEKTTRANSISTOREN

摘要

The present invention provides a silicon gate FET and associated integrated circuit structure in which a second level of polysilicon is selectively oxidized to provide insulating regions where desired. Regions of the polysilicon which were not oxidized are suitably doped to function as electrical interconnects to the source and drain regions in the substrate and to the gate. In the preferred embodiment, a metallic interconnection is made between the gate and drain or source region with the second level of polysilicon.