Removing silicon and boron (halogenated) hydride and halide from gas - esp. vacuum pump exhaust gas in semiconductor mfr., by alkaline hydrolysis

摘要

Before hydrolysis, the gas mixt. is contacted with packing material of large surface area, pref. glass, clay or ceramic rings or glass fibres, for the adsorption of oil mist. It is then passed through several wash bottles filled with 20-40 (30)% alkali soln. Inert gases, e.g. N2 or Ar, can be mixed with the gas mixt. Method is simple, reliable and reduces environmental pollution.