发明名称 |
Process of vapor depositing photoconductive material. |
摘要 |
<p>A process of vapor depositing photoconductive material. The process is particularly suitable for preparing arsenic-selenium photoreceptors wherein the arsenic distribution in the photoreceptor, particularly at its top surface, is controlled within a preferred concentration range. The process comprises controlling the evaporation rate of the arsenic-selenium alloy by means of a crucible weight sensing system to monitor alloy depletion rate and a cascade dual-loop feedback control system processing both crucible assembly weight change and temperature to modify resistive power input to the crucible.</p> |
申请公布号 |
EP0028514(A1) |
申请公布日期 |
1981.05.13 |
申请号 |
EP19800303880 |
申请日期 |
1980.10.30 |
申请人 |
XEROX CORPORATION |
发明人 |
HORDON, MONROE J.;GERACE, ROBERT E. |
分类号 |
G03G5/082;C23C14/54;H01L31/0264;H01L31/18;(IPC1-7):23C13/04 |
主分类号 |
G03G5/082 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|