发明名称 |
Method and device for contact-free interval or thickness measurement by control of the direction of a light ray beam |
摘要 |
A method and apparatus is disclosed for contact-free interval or thickness measurement. A sharply concentrated light beam is periodically deflected over a measuring space having a measuring plane and reference plane situated therein. A beam divider is positioned after the beam deflector and deflects the beam towards first, second and third light detectors. A fourth light detector is also provided to receive reflected light from the measuring plane and reference plane. A first time difference is utilized to control deflection frequency of the light beam; a second time difference controls deflection amplitude of the light beam; a third time difference determines a spacing of the measuring plane from the reference plane; and a fourth time difference corrects for changes in a direction of the light beam such as when a new light source is positioned in the system or when other directional errors occur.
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申请公布号 |
US4266875(A) |
申请公布日期 |
1981.05.12 |
申请号 |
US19800118778 |
申请日期 |
1980.02.05 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BODLAJ, VIKTOR |
分类号 |
G01B11/00;G01B11/02;G01B11/06;G01S17/46;(IPC1-7):G01S9/62 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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