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发明名称
Verfahren zur Erhoehung des Aufloesungsvermoegens eines Raster-Elektronen-Mikroskops
摘要
申请公布号
DE1639276(A1)
申请公布日期
1970.07.09
申请号
DE19681639276
申请日期
1968.02.02
申请人
IBM DEUTSCHLAND INTERNATIONALE BUERO-MASCHINEN GMBH
发明人
BIEDERMANN,DR.EGINHART;BRACK,KARL
分类号
H01J37/26;H01J37/28
主分类号
H01J37/26
代理机构
代理人
主权项
地址
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