| 摘要 |
PURPOSE:To permit autoprobing to be accurately, stably and speedily performed by newly forming a target pattern for autoprobing on the region other than the ordinary regions for chips. CONSTITUTION:A target for autoprobing comprises regions 21 on a surface 10' of an Si substrate 10 where striped plane Al thin layers 15 have been left, and a region 20 surrounded by the regions 21 where the thin layers 15 have been removed so that the surface 10' has been exposed. Thus, the surface of the regions 21 has an ideal unevenness, so that a laser beam is scattered extremely efficiently. Moreover, becaused the surface 10' of the region 20 is an optical mirror surface, no laser beam is scattered. Therefore, scanning the regions 21 20 21 with laser beams to measure the reflected light permits an extremely stable contrast to be obtained. Such targets are inserted into two given right and left positions on an Si wafer. This permits autoprobing to be stably and speedily performed. |
