PROTECTIVE MATERIAL FOR SELECTIVE ETCHING,申请号JP19790127912-传众专利搜索

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发明名称	PROTECTIVE MATERIAL FOR SELECTIVE ETCHING
摘要
申请公布号	JPS5651774(A)	申请公布日期	1981.05.09
申请号	JP19790127912	申请日期	1979.10.05
申请人	HITACHI LTD	发明人	AOKI KEIICHI
分类号	G09F9/30;H01L21/302;H01L21/3065;H05K3/06	主分类号	G09F9/30
代理机构		代理人
主权项
地址

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