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经营范围
发明名称
GAS ETCHING METHOD
摘要
申请公布号
JPS5651582(A)
申请公布日期
1981.05.09
申请号
JP19790127541
申请日期
1979.10.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMADA MITSURU
分类号
C23F4/00;C23F1/00;H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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