| 发明名称 |
PROCEDIMENTO PER DEPOSITARE MATERIALE DA UN FLUSSO DI PARTICELLE SU UN SUBSTRATO COLLETTORE. |
| 摘要 |
Implantation of a particle flux (200), for example a laser produced particle flux, upon a substrate (5) is enhanced by premelting the substrate surface with a beam of radiation (110) from a pulsed high energy source (2) such as a laser source. The premelting is provided prior to the arrival of the particle flux in order that the particle flux impinge upon an area of the substrate which is melted. |
| 申请公布号 |
IT8121601(D0) |
申请公布日期 |
1981.05.08 |
| 申请号 |
IT19810021601 |
申请日期 |
1981.05.08 |
| 申请人 |
WESTERN ELECTRIC CO. INCORPORATED |
发明人 |
WILLIAM THOMAS SILFVAST |
| 分类号 |
H01L21/203;C23C14/02;C23C14/28;C23C14/48;C23C26/00;C30B1/02;C30B31/22;H01L21/20;H01L21/223;H01L21/26;H01L21/268;(IPC1-7):C23C/ |
主分类号 |
H01L21/203 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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