| 摘要 |
<p>The flow sensor comprises two support plates (7,9) mounted parallel to the direction of fluid flow (2) and spaced a small distance apart. The lower plate supports a conducting layer (4) through which a heating current flows. Two measuring resistances (6a,6b) are deposited on an insulating layer (5) on this plate and are located opposite a reflecting layer (16) on the upper plate. A measuring coating (10) deposited on top of the upper plate allows a constant temperature difference to be maintained between the heat source and measuring resistances. The temp. sensitive coating (10) is a nickel alloy, or a noble metal formed in a thin layer, or a glass incorporating fine metallic particles. The heat source is made from silicon with a coating made of semiconductor or metallic material, and a final protective coating.</p> |
