| 摘要 |
<p>A method of manufacturing an oxidizing agent comprises the step of oxidizing polyoxyalkylene having an average molecular weight of 1,000 to 30,000 and being represented by the following general formula: ? R - O ?n where R stands for alkylene group represented by (CH2)m where m = 2 or 3. A solution such as an aqueous solution containing polyoxyalkylene of more than 1% by weight, or a melted polyoxyalkylene is treated by supplying an oxidizing gas thereinto to oxidize and decompose the polyoxyalkylene into the oxidizing agent. A method of oxidation by the use of the oxidizing agent manufactured by the above-described method is applied to, for example, a surface treatment of semiconductor or metal.</p> |
