发明名称 ELECTRON BEAM DEVICE
摘要 PURPOSE:To obtain the quantity of electron beams always in a stable condition, by keeping only the continuous operation of heating a filament in a vessel when its separate valve is operated for the replacement of samples. CONSTITUTION:To obtain an independent vacuum state in a vessle 4, a knob 14 is pushed to close an electon beam passage at the lower portion of an anode 3 by a seperate valve 11 integrally formed with a shaft 12. Then a microswitch 13 is operated, and the operation of a relay 15 turns off a high voltage control switch 6' to stop the supply of a high voltage the accelerates an electron beam. Here the heating power of a filament is not cut out by the operation of the microswitch 13, then the firing for a heater for heating source of the electron beam is continued even if the seperate valve 11 is actuated to obtain independent vacuum state in the vessel 4.
申请公布号 JPS5648044(A) 申请公布日期 1981.05.01
申请号 JP19790123912 申请日期 1979.09.28
申请人 HITACHI LTD 发明人 NAMIKAWA YOSHIHISA
分类号 H01J37/248;H01J37/04;H01J37/18 主分类号 H01J37/248
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