发明名称 EXPOSURE METER FOR ELECTRON BEAM
摘要 PURPOSE:To correct a display error of an electron beam detector due to the reduction of an irradiation range of an electron beam, by changing the amplification degree of a circuit, that amplifies an output of the electron beam detector, in an interlocking action to the change of the irradiation range of the electron beam on a fluorescent plate. CONSTITUTION:When the magnification for obtaining a smaller area of irradiation of an electron beam is selected by a magnification selector switch 5, a solenoid relay 6a is operated to connect a resistor 10 and apply a resistance Ri2 in parallel to a resistance Ri1. Accordingly an input to an amplifier 3 is increased to increase the display value of a quantity of electron beams. When further changed the magnification, the magnification selector switch 5 is connected to the next terminal to actuate the other solenoid relay 6b, connect a resistor 9 further apply a resistance Ri3 in parallel. In this way, an adequate quantity of electron beams per unit area is displayed on a display panel 4.
申请公布号 JPS5648043(A) 申请公布日期 1981.05.01
申请号 JP19790123909 申请日期 1979.09.28
申请人 HITACHI LTD 发明人 KOUCHI TOSHIO
分类号 G01N23/225;G01T1/29;H01J37/04;H01J37/26 主分类号 G01N23/225
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