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发明名称
Verfahren zum Herstellen von Halbleitervorrichtungen
摘要
申请公布号
DE1544211(A1)
申请公布日期
1970.10.22
申请号
DE19661544211
申请日期
1966.06.23
申请人
ION PHYSICS CORP.
发明人
JAMES KING,WILLIAM
分类号
H01J37/317;H01L21/00;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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