| 摘要 |
PURPOSE:To ensure an assured detection of the crack, by irradiating the light to the throwaway chip with an angle of the best S/N at all times. CONSTITUTION:The throwaway chip 1 is shifted while keeping the angle formed by the projected light 2 and the chip side, and thus the entire end parts of the chip 1 are image-formed to the photoelectric transducer 4. And if some crack is caused at the end parts of the chip 1, the output of the transducer 4 has some change. The angle between the chip 1 and the projected light is set preferably to about 50-80 deg.; and the transducer 4 is provided preferably with an angle orthogonal to the side of the chip 1 since the transducer 4 receives the diffused reflection of the reflected light. |
