| 摘要 |
PURPOSE:To remove all impurities such as living bacteria, electrolytes, fine particles, organic carbons, etc., and prepare ultra-pure water by passing primary pure water through a mixed bed polisher, an ultraviolet irradiation device and a reverse osmosis membrane device in order one by one and treating the same. CONSTITUTION:Reverse osmosis membrane devices 6a-6d are provided at least two lines or more, and a sterilizing liquid is passed through a reverse osmosis membrane devices in one line and then washed by primary pure water, and then said pure water is passed through a mixed bed polisher 3, an ultraviolet sterilization device 4 and then a reverse osmosis membrane device. Said permeated water is circulated in a foregoing stage of the mixed bed polisher 3 and used. Thus, while sterilization treatment is carried on in one line, ultra- pure water is prepared in reverse osmosis membrane devices in one line. Then, ultra-pure water is prepared by using sterilized reverse osmosis membrane devices, while sterilization treatment is followed similarly in the reverse osmosis membrane devices in other lines, preparing ultra-pure water. |
