Resistance thermometer with stable linear characteristic to high temp. - has insulating substrate with rhodium or iridium thin film resistor

摘要

Resistance thermometer with linear characteristic consists of an electrically insulating substrate with a metal thin film resistor, consisting of Rh or Ir. Pref. Rh or Ir films are applied by cathodic sputtering with Kr and/or Xe or a gas mixt. contg. min. 50 vol.% Kr and/or Xe as operating gas and a bias is applied to the substrate during the deposition process. The metal films are then tempered in an inert atmos. Thermometer has a stable linear characteristics up to 500 deg.C and has a high temp. coefft. of resistance similar to that of the Pt resistance thermometer.