IMPROVED CHEMICAL VAPOR DEPOSITION METHOD OF PRODUCING FLUORINE-DOPED TIN OXIDE COATINGS

摘要

A fluorine-doped tin oxide coating having a minimum and constant sheet resistance under different process conditions is produced by a chemical vapor deposition method using a liquid coating composition containing 1-30 wt % of an organic fluorine dopant and 70-99 wt % of an organotin compound and optionally up to 10% of a polar organic solvent. This composition is vaporized into a wet carrier gas which is decomposed on the substrate, the vapor concentrations satisfying the condition that the parameter M defined by the equation given below is 50,000 or less: $where\; (AIR)\; (H2O)\; and\; (OFD)\; and\; (O)\; are\; respectively\; in\; moles\; the\; concentration\; of\; the\; carrier\; gas,\; the\; concentration\; of\; water\; in\; the\; carrier\; gas,\; the\; concentration\; of\; the\; organic\; fluorine\; dopant\; in\; the\; carrier\; gas\; and\; the\; concentration\; of\; organotin\; compound\; in\; the\; carrier\; gas.$