| 摘要 |
PURPOSE:To obtain an infrared-ray detector having high sensitivity, high reliabiliby and high durability each, by providing the pyroelectric crystals in a body and via the earth electrode onto the silicon substrate having a hole at the area opposing to the light receiving electrode of the pyroelectric crystal. CONSTITUTION:The light receiving electrode 12 is formed on the upper surface of the pyroelectric crystal 11 made of the LiTaO3 crystal, and the earth electrode 13 is provided on the back of the crystal 11. The surface containing the electrode 13 is adhered to the silicon plate 15 via the conductive adhesive 14. The plate 15 has the main face of the (100) face, and the hole 16 is drilled at the center of the main face by anisotropic etching. The foot part of the plate 15 is adhered to the mount 18, and this mount 18 serves as the lead end of the electrode 13. At the same time, the lead end 20 is provided at the side area of the mount 18 via the insulating material 19 to be connected to the electrode 12 via the lead wire 21. In such way, an infrared-ray detector can be obtained with a high sensitivity, high reliability and high durability each. |
