| 摘要 |
PURPOSE:To speed up positioning by making the movable portions of a moving apparatus of a nonferrous light metal material and using a soft and light material as the guide rail material. CONSTITUTION:Guide rails 2-4 are provided on a surface plate 1. An X-moving table 5 slides with its load born by the guide rails 2-4. To the lower surface of the moving table 5, sliding members 6 of thin plates of glass fiber-containing polytetrafluoroethylene is bonded in order to reduce frictional resistance. On the moving table 5, guide rails 10-12 for the Y-axis are provided, which are integral parts of the moving table 5 and made of a nonferrous light metal material, such as Duralumin. A Y-moving table 13 is also made of the similar material. The sliding surfaces of these guide rails are plated with hard chrome or the like in order to improve the durability of the surfaces as well as to reduce the friction factor. This permits the weight of the movable portions of the tables to decrease, so that the speedup positioning can be attained. |
