MICROWAVE PLASMA FINE PARTICLE TREATING APPARATUS

摘要

PURPOSE:To make the recovery of the treated fine particles extremely easy at the time of performing treatment of the fine particles with the plasma by microwave dischraging by introducing an antenna for microwaves into a hermetic vessel containing the fine particles by way of a cylindrical body. CONSTITUTION:A heat-resistant fine particle containing vessel 16 made of quartiz, alumina or the like is disposed in a plasma forming chamber 5 of hermetic type made of metals, and the fine particles 17 to be treated are put therein. A cylindrical body 22 made of quartz is also placed in the central part of the vessle 16 and an antenna 21 made of copper or the like is disposed therein. The inside of the plasma forming chamber 5 is evacuated to about 1X10<-5>torr by an exhauster 8 and the plasma forming gas in a bomb 12 is admitted therein. Next, microwaves of 10<9>- 10<12>Hz are generated with a microwave generator 1 and are led to the antenna 21 so that plasma is produced by discharging. The fine particles 17 are treated with this plasma and thaken out from the vessel 16 without staining the hermetic vessel 16.