SCANNING TYPE ELECTRON MICROSCOPE DEVICE

摘要

PURPOSE:To supress the acceleration voltage of a primary electron beam at a low level without causing a change in a cathode electrode and scanning devices, by arranging an electric field generating part for decelerating the electron beam between a scanning coil and a sample. CONSTITUTION:An electron generated by a cathode 1 is accelerated by an anode 2, focused by a condenser lens 3 and object lens 4 and controlled its beam direction by a scanning coil 5. At rear stage of the scanning coil 5 an electric field generating grid 7 is arranged. By applying a positive potential to said grid 7, the electron beam is decelerated, changed into an electron beam at low potential and emitted incident upon a sample 6 like semiconductor or large scale integrated circuit (LSI).