| 摘要 |
PURPOSE:To enable to judge the washing effect of Si particles elimination quantitatively by a method wherein HF treated Si substrate is dried to be a monitor piece after it is immersed in Se particles suspended aqueous solution. CONSTITUTION:The Si piece of appropriate size is washed and immersed in the HF solution to make the surfase therof as a water-repellent, washed and dried. The Si suspension that Si particles of the particle size 0.1-1mum is dispersed uniformly in a distilled water is prepared. When the treatment completed Si piece is immersed and dried to make the monitoring piece, the number of particles, approximately 2,000 pieces/cm<2> can be readily obtained. The washing effect of a washing liquid can be quantitatively judged by the difference of the particle attaching density before and after the test of monitoring piece. |
