| 摘要 |
PURPOSE:To allow bag-shaped body of a mask to easily make a close contact with a tubular body, by inserting the bag-shaped body, constituted by a prescribed elastic material with a prescribed pattern on its outer surface, into the tubular body with a photoresist on its inner surface and increasig an internal presure of the bag-shaped body. CONSTITUTION:An exposure mask 14 is formed into a bag-shape with an elastic material almost transparent to a resist exposure electromagnetic wave, and on its cylindrical side face 17 a prescribed pattern is printed by paints. Said mask 14 is inserted into a glass bulb 4 on an inner surface of which a resist 6 is formed, and the pattern on the side face 17 is closely contacted to the resist 6 by increasing an internal pressure of a hollowed part 15. Then the glass bulb 4 to which the mask 14 is equipped is arranged in a prescribed container 20, and an electromagnetic wave is irradiated toward a hollowed part 11 from windows 18, 18' while introducing and discharging gas mixed with an electromagnetic wave dispersing fine particles for resist exposure into and from inlet and outlet ports 19, 19' thus to irradiate the pattern formed surface. |
