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发明名称
摘要
申请公布号
DE2047756(A1)
申请公布日期
1971.06.03
申请号
DE19702047756
申请日期
1970.09.29
申请人
TRW INC
发明人
分类号
H01L21/00;H01L21/24;H01L21/329;H01L29/00;H01L29/866;(IPC1-7):H01L/
主分类号
H01L21/00
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代理人
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地址
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