| 摘要 |
PURPOSE:To monitor the irradiated position and the laser light axis at all times and to enable quick processing, by constituting the intermediate reflection mirror irradiated with light between the laser oscillator and laser light and light diffractive external reflection mirror, with the laser light through-hole and the light reflection section at the external circumference. CONSTITUTION:The light 11 from the light generator 13 is fed to the laser oscillator 1 at the refleftion section 23 of the intermediate reflection mirror 22 via the beam splitter 21. Next, the light 11 is reflected at the full reflector mirror 3, it overlapped with the optical path of the laser light 6 from the oscillator 1 and it is diffractive downward at the right angle at the external reflection mirror 7 through the hole 24. Further, it is narrowed with the focus lens 8 so that the laser light 6 and the light 11 can irradiate the object to be processed 9 at all times. Accordingly, this light 11 irradiation point can be given to the processing part. |
