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发明名称
摘要
申请公布号
JPS5640663(U)
申请公布日期
1981.04.15
申请号
JP19790122875U
申请日期
1979.09.05
申请人
发明人
分类号
H01L21/52;H01L21/58;(IPC1-7):H01L21/58
主分类号
H01L21/52
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