| 摘要 |
PURPOSE:To enable laser processing under clean atmosphere, by providing the collective unit suctioning the evaporating material from object to be treated, in the laser processing in the chamber filled by inactive gas. CONSTITUTION:The evaporated material from object to be treated is suctioned and collected in the direction apart form the path of laser light. The collector 8 consists of the suction 12 located above the radiation part of laser light 1, flow branching plate 11 warping the gas flow including the evaporated material suctioned from the path of laser light, and discharge outlet 9. The laser light 1 is touched on the object 3 to be treated and the inactive gas atmosphere 6 is fed from the supply inlet 10 in the chamber 5. The most parts of evaporated material 4 from the object 3 is adhered to the inner wall of the unit 8 and the flow branching plate 11, and the exhaust gas 9 including comparatively less evaporated material 4 is reused outside the chamber. Further, by filling the filter material such as glass fiber to the space in the unit 8, the efficiency of colllection of evaporated material can be increased. |
