| 摘要 |
PURPOSE:To prevent the adhesion of a useless foreign matter to a substrate in the rotary evaporation device by a method wherein guiding members to guide follower rollers being provided at one side of each hanging tool and to control the angle of each hanging too lare provided at the sides of rotating frame of the device. CONSTITUTION:On the circumference of both side plates of a rotating frame 8 in the rotary evaporation device, shafts 12 are arranged at an equal interval and hanging tools 11 are supported by the shafts 12 rotation freely with the shaft. Follower roller holding plates 13 are sticked to the shafts 12 rotation freely with the shaft by a pair of follower rollers 14. Guiding members 15 to guide the follower rollers 14 and to control the angle of inclination of the hanging tools 11 are provided at the sides of the rotating machine 8. By this way, the evaporation film forming face of substrate 5 are kept always in downward having the angle of inclination less than 90 deg. preventing the adhesion of a foreign matter to the evaporation film forming face of substrates 5 generating by the peeling off of evaporated substance adhering to a vessel 1, and the using of plural kind of substrates 5, 5' having the different external forms becomes possible to be suitable for the mass production. |
