VERFAHREN UND EINRICHTUNG ZUR BESCHICHTUNG EINES SCHICHTTRAEGERS DURCH KATHODENZERSTAEUBUNG,申请号DE19803036011-传众专利搜索

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发明名称	VERFAHREN UND EINRICHTUNG ZUR BESCHICHTUNG EINES SCHICHTTRAEGERS DURCH KATHODENZERSTAEUBUNG
摘要
申请公布号	DE3036011(A1)	申请公布日期	1981.04.09
申请号	DE19803036011	申请日期	1980.09.24
申请人	COULTER SYSTEMS CORP.	发明人	R. KUEHNLE,MANFRED
分类号	C23C14/56;(IPC1-7):C23C15/00	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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