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发明名称
VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG EINER IONENSTROEMUNG
摘要
申请公布号
DE3034782(A1)
申请公布日期
1981.04.09
申请号
DE19803034782
申请日期
1980.09.15
申请人
NEDERLANDSE CENTRALE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK
发明人
POOLE,PROF.,JAN LE;KRUIT,PIETER
分类号
H01J3/04;H01J27/20;H01J49/14;(IPC1-7):H01J37/08;H01L21/26
主分类号
H01J3/04
代理机构
代理人
主权项
地址
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