| 摘要 |
PURPOSE:To obtain a high contrast image even if the processing of a sample is not performed, by using the composite signal, from a detection signal of transmission electron beams and a detection signal of secondary electrons generated from the sample, as a picture signal. CONSTITUTION:By deflecting coils 8X, 8Y to which an outpt is fed from a scanning signal circuit 7, an electron beam 4 is two-dimensionally scanned on the surface of a sample, and from the sample 1 a secondary electron, reflected electron, X-ray, transmission electron beam and the like are generated. Of those in the above, the secondary electron and the transmission electron beam are detected by each of detectors 9, 10, allowed to pass through amplifier circuits 11, 12 then added in a signal processing circuit 13 and used as an intensity modulation signal for a cathode-ray tube 2. Then to deflecting coils 14X, 14Y the output from the scanning signal circuit 7 is applied permitting the display of a scanning image relating to the sample 1 on the picture face of the cathode-ray tube 2. Said scanning image is obtained by overlapping images relating to the surface of the sample and relating to the inside of the sample in a state of high contrast. |
