发明名称 MANUFACTURING OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To finely make the heating control and eliminate fusing disparities by using as a heater a heat resisting substrate when the tip end of a Dumet wire, around which beads are wound, is inserted into a glass tube, and the beads and glass tube are heated and fused to form a minute semiconductor vessel. CONSTITUTION:The tip and of a dumet wire 5, around which heads of are wound, is inserted into a glass tube 1 to be sealed, and the outer periphery of the glass tube 1 corresponding to the beads 4 is inserted into the hole of a carbon heater 6. A current is caused to flow to the heater 6 from the electrode 10 of the heater 6 to fuse and fix the beads 4 to the glass tube 1. That is, a number of holes are formed on the heater 6, and a plurality of glass tubes 1 while being aligned by lead guides 9, are inserted into the holes, and the lower ends of the glass tubes 1 are set at predetermined positions by positioning pins 3, and fixed to glass stopper disc. By said procedure, a current flowing to the heater 6 can be controlled accurately and fusing disparities are not produced.
申请公布号 JPS5635438(A) 申请公布日期 1981.04.08
申请号 JP19790110578 申请日期 1979.08.29
申请人 NIPPON ELECTRIC CO 发明人 SHIKANAKA TOSHIYUKI
分类号 C03C27/04;H01L21/50;H01L23/08 主分类号 C03C27/04
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