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发明名称
摘要
申请公布号
JPS5615149(B2)
申请公布日期
1981.04.08
申请号
JP19730090217
申请日期
1973.08.10
申请人
发明人
分类号
H01L29/78;H01L29/41
主分类号
H01L29/78
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