摘要 |
PURPOSE:To drive a very small amount of fluid with high accuracy by constructing the shell of a cylindrical vessel with a piezoelectric sheet and by providing a nozzle on the upper plate of the cylindrical vessel. CONSTITUTION:The shell of a cylindrical vessel 1 consists of a piezoelectric sheet 3. On both sides of the shell are provided electrode 5 and 5'. On the upper plate of the cylindrical vessel 1 is also provided a nozzle 8 which goes through a nozzle hole 7. Application of a D.C. voltage to the electrodes 5 and 5' contacts the piezoelectric sheet 3, decreases the inner volume of the cylinder and ejects fluid through the nozzle 8, thereby enables to drive a very small amount of fluid with high accuracy. |