TARGET OF IMAGE PICKUP TUBE HAVING TAPERED ELECTRODES

摘要

The specification discloses a target of an image pickup tube produced by at first forming a striped transparent conductive film on a substrate in such a manner that the angle formed between the surface of the substrate and the edges of cross-section of the film falls below 20.degree., and then forming a photoconductive film on the striped transparent conductive film. In order to control the angle formed between the surface of the substrate and the side edges of cross-section of the transparent conductive film, a mask of a predetermined pattern is first formed on the transparent conductive film with a post-type photosensitive material, and is then subjected to irradiation with ultraviolet rays. The mask is then heat treated so that the side edges of the mask may be suitably tapered. Finally, the transparent conductive film is formed by a sputter etching technique. The target thus produced has improved characteristics compared with targets formed in the conventional manner, especially improved after-image characteristics.