| 摘要 |
PURPOSE:To reduce the cost of and to enhance the efficiency of a solar battery by coating an amorphous silicon on a light emitting surface side of a silicon crystal to become a base. CONSTITUTION:A P type amorphous silicon 22 is coated on the light emitting surface side of an N type silicon single-crystalline substrate 21, and a P type electrode 23 and an N type electrode 24 are further formed thereon. For example, N type silicon substrate 21 is used, a mixture gas of monosilane and diborane is flowed at substrate temperature of 300-350 deg.C during glow discharge, and the film 22 is grown by 500-1,500Angstrom . Further, aluminum is sputtered as the electrodes 23 and 24. |
