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发明名称
VORRICHTUNG UND VERFAHREN ZUR LEISTUNGSZUFUEHRUNG AN EINE VON DEM ENTLADUNGSPLASMA EINER ZERSTAEUBUNGSVORRICHTUNG GEBILDETEN LAST
摘要
申请公布号
DE2939167(A1)
申请公布日期
1981.04.02
申请号
DE19792939167
申请日期
1979.09.27
申请人
COULTER SYSTEMS CORP.
发明人
JAMES WEBER,HAROLD
分类号
C23C14/34;H01J37/34;H03H7/38;(IPC1-7):C23C15/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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