Vacuum vapour deposition appts. in which substrates are rotated - esp. suitable for producing corrosion resistant coatings on gas turbine blades

摘要

The vacuum chamber contains a long evapn. crucible with a rectangular shape, and is located next to a loading chamber contg. a trolley driven along a pair of rails by an electric motor. The trolley is fitted with a jib consisting of two symmetrical arms, extending into the vacuum chamber, and each arm carries a row of substrate holders. The trolley also carries sets of bevel gears employed to rotate a shaft in each arm. Each of the two shafts has a row of gears and couplings for rotating holders. The couplings on one arm are pref. staggered w.r.t. the couplings on arms so the substrates are near each other and form a row above the crucible. Uniform coating of substrates in mass prodn., esp. superalloy turbine blades.