发明名称 Photo-induced temperature gradient zone melting
摘要 A temperature gradient zone melting process is disclosed wherein the temperature gradient is established substantially across only the molten zone by preferentially heating the molten zone. In a specific embodiment, the mechanism for inputting heat to the molten zone involves exposing the substrate to optical radiation of a wavelength and magnitude for which the molten zone is absorptive and the remainder of the body is transparent. The molten zone thereby migrates through the body toward the source of optical radiation.
申请公布号 US4257824(A) 申请公布日期 1981.03.24
申请号 US19790062350 申请日期 1979.07.31
申请人 BELL TELEPHONE LABORATORIES, INCORPORATED 发明人 JACKSON, KENNETH A.;KIMERLING, LIONEL C.;LEAMY, HARRY J.
分类号 H01L21/228;C30B13/00;C30B13/06;C30B13/10;C30B13/24;H01L21/24 主分类号 H01L21/228
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