| 发明名称 |
VACUUM COATING APPARATUS HAVING MEANS FOR POSITIONING ONE OF A PLURALITY OF MEMBERS AT A SELECTED LOCATION BETWEEN THE SUBSTRATE AND THE COATING MATERIAL SOURCE |
| 摘要 |
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| 申请公布号 |
US3661759(A) |
申请公布日期 |
1972.05.09 |
| 申请号 |
USD3661759 |
申请日期 |
1970.02.19 |
| 申请人 |
VARIAN ASSOCIATES |
发明人 |
HAROLD WILLIAM BRUCE;WERNER E. SANDVOSS |
| 分类号 |
C23C14/34;(IPC1-7):C23C15/00 |
主分类号 |
C23C14/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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