摘要 |
1,081,858. Testing for cracks in materials. SPERRY RAND CORPORATION. Nov.23, 1965 [Nov.23, 1964], No.49686/65. Heading G1S. In a method of testing the continuity of a layer of relatively low conductivity which covers a surface of relatively high conductivity, e.g. in semiconductor devices comprises the steps of covering the layer with an electrolyte, setting upon E.M.F. between a first electrode in said electrolyte and said surface as a second electrode, arranged so as to cause electro-deposition of material in the neighbourhood of any discontinuities and detecting the presence of such material by current flow or visually using a microscope. Copper or nickel electrolytic plating solution may be used. |