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发明名称
摘要
PURPOSE:To shorten the necessary time for the mask matching, by overlapping the short and long sides of the rectangular key and then carrying out the mask matching through the spot and lines.
申请公布号
JPS5612012(B2)
申请公布日期
1981.03.18
申请号
JP19770010076
申请日期
1977.01.31
申请人
发明人
分类号
G03F1/00;G03F1/38;H01L21/027;H01L21/68
主分类号
G03F1/00
代理机构
代理人
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