| 摘要 |
PURPOSE:To attempt the reduction of measuring time and the alleviation of labour for the calibration of inclination between the Y measuring face of a transferring desk and the scanning of an electron beam and of sensitivity against the X, Y deflection by a method wherein the transferring desk is made to transfer along the inclination of the scanning of electron beam, and the magnitude of transferring is measured by a measuring machine. CONSTITUTION:A calibration mark provided on a transferring desk 36 is scanned by an electron beam projected from a deflecting plate 3a and reflected electrons are detected by a detector 33 to detect the X, Y positions of the calibration mark by the scanning of electron beam, and at the same time the length values measured with X, Y measuring machines 37, 38 are detected. The transferring desk 36 is transferred by X, Y driving circuits 39, 40 keeping the Y position of calibration mark detected by the scanning of electron beam at constant. The X, Y positions of the calibration mark after the desk is transferred are detected by the scanning of electron beam, and at the same time the length values measured with the X, Y measuring machines 37, 38 are detected. Comparing the detected values of the X, Y positions obtained by the scanning of electron beam, and the X, Y length values measured by the measuring machines obtained respectively before and after the transferring of desk, the calibration of the inclination between the measuring face of the Y measuring machine 37 and of the scanning breadth of electron beam are performed. |
