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发明名称
摘要
申请公布号
JPS5627681(U)
申请公布日期
1981.03.14
申请号
JP19790110194U
申请日期
1979.08.10
申请人
发明人
分类号
G01R31/28;G01R31/26;G01R31/3185;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):G01R31/26
主分类号
G01R31/28
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代理人
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地址
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