| 摘要 |
PURPOSE:To obtain magnetic characteristics suitable for stable and high-density recording, by forming an Fe3O4 film containing Co on a substrate whose main ingredient is Al alloy by a reactive evaporation method, and obtaining a gamma-Fe2O3 film by oxidizing treatment. CONSTITUTION:Oxygen gas is introduced into a high vacuum container, and the oxygen atmosphere of 4-5X10<-4>Torr is maintained. Then, FeCo alloy containing Co of 2% or more is evaporated from the evaporating source, and a thin iron oxide film whose main component is Fe3O4 containing Co is formed on a substrate whose main imgredient is Al alloy. Then, the heat treatment is performed, and a thin film whose main component is gamma-Fe2O3 containing Co is obtained by transformation. In this method, it is possible to manufacture thin film oxide magnetic recording media wherein a coercive force Hc and other magnetic characteristics are remarkably improved, an inexpensive Al alloy substrate is used, and the magnetic characteristics suitable for stable and high-density recording are provided. |
