| 摘要 |
PURPOSE:To obtain a satisfactory tunnelling characteristic by obtaining a barrier layer of a prescribed thickness, when providing No.1 and No.2 superconductive electrodes, which are crossing each other and extended, on a substrate through a tunnelling barrier layer, by using particular materials for the barrier layer and the electrodes. CONSTITUTION:A No.1 superconductive electrode 2 is attached onto a substrate 1, and a No.2 superconductive electrode 4 which is crossing the electrode 2 and extending is formed on the electrode 2 through a tunnelling barrier layer 3. In this constitution, the formations are done by conducting spattering in an inert gas atmosphere using special materials as follows. Nb is used for the No.1 electrode 2, Nb or deltaNbN is used for the No.2 electrode 4, and as for the material for the barrier layer 3 betaNb2N or epsilonNbN is selected. It is possible, by doing so, to obtain the barrier layer 3 of a prescribed thickness and also to obtain a satisfactory tunnelling characteristic. |
