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发明名称
摘要
申请公布号
JPS5611007(Y2)
申请公布日期
1981.03.12
申请号
JP19770123964U
申请日期
1977.09.14
申请人
发明人
分类号
F23Q3/00;H01L41/00;H01L41/113;H02N2/00;H02N2/18
主分类号
F23Q3/00
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代理人
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