| 摘要 |
PURPOSE:To prevent the generation of air bubbles, yarnlike passages and latent deformation in the sealing material for a solid image pickup device by softening the sealing material upon preheating thereof, then contacting a package with an opening glass, pressurizing it, and bring it to regular heating. CONSTITUTION:A sealing material is coated on an opening glass 6 and on a ceramic package 1, and the glass 6 and the package 1 are chucked with jigs 10, 11 are heated to the sealing material softening point beforehand. Thereafter, both are made in contact with each other, pressure is applied thereto, are heated to hardening temperature to retain for predetermined time to be cured, the pressure is then removed, and the jigs are removed, to be cooled thereat. This configuration can dissipate gas during preheating step to produce no air bubbles nor yarnlike passage without leakage in sealing, and the sealing material is liquefied in the preheating step to be thus made contact at the glass with the package, and strain is therefore reduced thereat. |
